Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna |
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Authors: | LI Lin-Sen XU Xu LIU Feng ZHOU Qian-Hong NIE Zong-Fu LIANG Yi-Zi LIANG Rong-Qing |
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Institution: | Institute of Modern Physics, Fudan University, Shanghai 200433 |
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Abstract: | Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results. |
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Keywords: | 52 35 Hr 52 50 Dg |
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