| Co基磁性薄膜的快速循环纳米晶化 |
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| 引用本文： | 荆玉兰,蒋向东,张怀武,石玉.Co基磁性薄膜的快速循环纳米晶化[J].压电与声光,2006,28(2):182-184. |
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| 作者姓名： | 荆玉兰 蒋向东 张怀武 石玉 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川,成都,610054 |
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| 基金项目： | 总装基金资助项目(51412010505DZ0243) |
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| 摘 要： | 采用独特的快速循环纳米晶化技术(RRTA)对直流磁控溅射制备的非晶CoNbZr软磁膜进行纳米晶化。研究了不同的纳米晶化工艺条件下,薄膜的微观结构和软磁性能。结果表明,CoNbZr软磁薄膜晶粒细化到30 nm,RRTA晶化方法可有效地控制CoNbZr薄膜的软磁性能。
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| 关 键 词： | 薄膜 软磁膜 纳米晶化 |
| 文章编号： | 1004-2474(2006)02-0182-03 |
| 收稿时间： | 2005-10-18 |
| 修稿时间： | 2005年10月18 |
The Rapid Recurrent Nanocrystalline of the Co Base Soft Magnetic Thin Films |
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| JING Yu-Lan,JIANG Xiang-dong,ZHANG Huai-wu,SHI Yu.The Rapid Recurrent Nanocrystalline of the Co Base Soft Magnetic Thin Films[J].Piezoelectrics & Acoustooptics,2006,28(2):182-184. |
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| Authors: | JING Yu-Lan JIANG Xiang-dong ZHANG Huai-wu SHI Yu |
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| Institution: | College of Microelectronics and Solid State Electronics, University of Electronic Science and Technology , chengdu 610054, China |
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| Abstract: | The rapid recurrent thermal annealing(RRTA) method has been used to crystallize the amorphous CoNbZr soft magnetic thin films,which were fabricated by DC magnetron sputtering.The structure and soft magnetic properties were investigated using RRTA method with variation parameters.As a result,crystalline grains with diameter of about 30 nm were formed.The experiment results revealed that the RRTA is an effective method to control the magnetic and electrical properties of CoNbZr thin films. |
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| Keywords: | thin film soft magnetic thin film nanocrystalline |
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