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“天光”一号MOPA系统光学元件加工与镀膜的进展
引用本文:高怀林,单玉生,王乃彦. “天光”一号MOPA系统光学元件加工与镀膜的进展[J]. 光学技术, 1997, 0(6)
作者姓名:高怀林  单玉生  王乃彦
作者单位:中国原子能科学研究院
摘    要:本文阐述了在中国原子能科学研究院“天光一号”KrF激光核聚变实验装置上,MOPA系统光学元件加工与镀膜研究工作的进展。实验测量结果表明,加工后的基片表面均方根粗糙度对于K9光学玻璃与熔融石英玻璃来说分别为σrms=1.8±0.5nm,σrms=2.0±0.4nm。镀HfO2/SiO2高反射膜的光学元件的反射率与破坏阈值分别为R>99.5%,Eth=1.30~1.33J/cm2。镀Al2O3/MgF2增透膜的光学元件的透射率与破坏阈值分别为T>99.5%,Eth=1.3~1.97J/cm2。

关 键 词:KrF激光,光学镀膜,破坏阈值

Progress in optical coatings for heaven Ⅰ MOPA system
Gao Huailin Shan Yusheng Wang Naiyan. Progress in optical coatings for heaven Ⅰ MOPA system[J]. Optical Technique, 1997, 0(6)
Authors:Gao Huailin Shan Yusheng Wang Naiyan
Abstract:The improvement in the performances of UV dielectric optical coating used in the Heaven Ⅰ facility has been achieved. The root mean square roughness of the substrates of fused silica and K9 optical glass are σ rms =2.0±0.4nm and σ rms =1.8±0.5nm, respectively. The transmittance of the anti reflection coatings and the reflection coefficient of the high reflector are all larger than 99.5%. The damage thresholds of the AR coatings and HR are 1.96J/cm 2 and 1.33J/cm 2,respectively. The pulse width and the wavelength of the irradiation KrF laser are 25 ns and 248 nm.
Keywords:KrF Excimer Laser   optical coatings   damage threshold.  
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