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Ion Implantation in Diazoquinone–Novolac Photoresist |
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| Authors: | Brinkevich D I Brinkevich S D Prosolovich V S |
| Abstract: | High Energy Chemistry - The processes of modifying the structural and optical properties of FP9120 and S1813 diazoquinone–novolac photoresist films on single-crystal silicon wafers beyond the... |
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