Preparation of Barium Titanate with Patterned Microstructure by a Novel Electrophoretic Deposition Method |
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| Authors: | T Hosokura Y Sakabe M Kuwabara |
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| Institution: | (1) Murata Manufacturing Co., Ltd., 26-10 Tenjin 2-chome, Nagaokakyo-shi, Kyoto 617-8555, Japan;(2) Department of Materials Engineering, School of Engineering, University of Tokyo, 7-3-1 Hongo, Tokyo 113-8656, Japan |
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| Abstract: | In order to prepare barium titanate (BaTiO3) with patterned microstructure, a novel electrophoretic method that uses a partially hydrolyzed highly concentrated solution of barium and titanium alkoxides was developed. By using electron beam lithography, a micro-patterned mold, that is a mold with an array of air holes of 250 nm arranged in a triangular lattice with a lattice constant of 500 nm was prepared on a Pt/Ti/SiO2/Si substrate. Electrophoretic deposition of BaTiO3 gel was carried out by negatively biasing the Pt/Ti/SiO2/Si substrate as cathode which had the resist mold on the surface. Removal of the resist mold left a gel material with a patterned structure that was transferred from the pattern of the mold. The gel material was confirmed by ICP-AES to have nearly the stoichiometric composition of BaTiO3, that is, a composition in which Ba:Ti = 1:1 in molar ratio. |
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| Keywords: | electrophoretic deposition patterned microstructure pillar array barium titanate |
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