Environmentally friendly approach for nonlithographic nanostructuring of materials |
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| Authors: | I M Tiginyanu E Monaico S Albu V V Ursaki |
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| Institution: | 1. National Center for Material Study and Testing, Technical University of Moldova, 2004 Chisinau, Moldova;2. Laboratory of Low‐Dimensional Semiconductor Structures, Institute of Applied Physics, Academy of Sciences of Moldova, 2028 Chisinau, MoldovaPhone: +373 22 274047, Fax: +373 22 319305;3. Laboratory of Low‐Dimensional Semiconductor Structures, Institute of Applied Physics, Academy of Sciences of Moldova, 2028 Chisinau, Moldova |
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| Abstract: | Self‐organized quasi‐ordered two‐dimensional hexagonal arrays of pores with diameters as low as 70 nm in n‐InP substrates subjected to anodic etching in aqueous solution of NaCl are reported. We show that proper periodic modulation of the applied potential with time allows one to reach 3D nanostructuring of the material. Anodization in salty water proves to be a cost‐effective and environmentally‐friendly tool for spatial nanostructuring of materials and nonlithographic manufacturing of semiconductor nanotemplates for nanofabrication. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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| Keywords: | 61 43 Gt 81 05 Ea 81 05 Rm 81 16 Dn 81 65 Cf |
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