Estimation of soft X‐ray and EUV transition radiation power emitted from the MIRRORCLE‐type tabletop synchrotron

The tabletop synchrotron light sources MIRRORCLE‐6X and MIRRORCLE‐20SX, operating at electron energies E_el = 6 MeV and E_el = 20 MeV, respectively, can emit powerful transition radiation (TR) in the extreme ultraviolet (EUV) and the soft X‐ray regions. To clarify the applicability of these soft X‐ray and EUV sources, the total TR power has been determined. A TR experiment was performed using a 385 nm‐thick Al foil target in MIRRORCLE‐6X. The angular distribution of the emitted power was measured using a detector assembly based on an NE102 scintillator, an optical bundle and a photomultiplier. The maximal measured total TR power for MIRRORCLE‐6X is P_max? 2.95 mW at full power operation. Introduction of an analytical expression for the lifetime of the electron beam allows calculation of the emitted TR power by a tabletop synchrotron light source. Using the above measurement result, and the theoretically determined ratio between the TR power for MIRRORCLE‐6X and MIRRORCLE‐20SX, the total TR power for MIRRORCLE‐20SX can be obtained. The one‐foil TR target thickness is optimized for the 20 MeV electron energy. P_max? 810 mW for MIRRORCLE‐20SX is obtained with a single foil of 240 nm‐thick Be target. The emitted bremsstrahlung is negligible with respect to the emitted TR for optimized TR targets. From a theoretically known TR spectrum it is concluded that MIRRORCLE‐20SX can emit 150 mW of photons with E > 500 eV, which makes it applicable as a source for performing X‐ray lithography. The average wavelength, = 13.6 nm, of the TR emission of MIRRORCLE‐20SX, with a 200 nm Al target, could provide of the order of 1 W EUV.