| 用甲醇-氢混合气源在不锈钢上生长金刚石薄膜的研究 |
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| 引用本文： | 张小平. 用甲醇-氢混合气源在不锈钢上生长金刚石薄膜的研究[J]. 高压物理学报, 1996, 10(3): 236-240 |
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| 作者姓名： | 张小平 |
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| 作者单位： | 郑州粮食学院物理教研室，河南郑州 450052 |
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| 摘 要： | 利用甲醇-氢（CH3OH-H2）混合气体为气源，30 nm厚的无定形硅为过渡层，借助于微波等离子体化学气相沉积（MWCVD）成功地将金刚石薄膜生长在不锈钢上，其最低生长温度可至420 ℃，并且甲醇-氢混合气体比传统的甲烷-氢（Ch4-H2）更具优势，测试表明这种金刚石薄膜有希望作为耐磨层在工业上应用。
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| 关 键 词： | 甲醇-氢混合气 不锈钢 金刚石薄膜 微波等离子体化学气相沉积 |
| 收稿时间： | 1996-01-31; |
Study on Diamond Film Deposition Growth on Stainless Steel Using Gas Source of CH3OH/H2 |
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| ZHANG Xiao-Ping. Study on Diamond Film Deposition Growth on Stainless Steel Using Gas Source of CH3OH/H2[J]. Chinese Journal of High Pressure Physics, 1996, 10(3): 236-240 |
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| Authors: | ZHANG Xiao-Ping |
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| Affiliation: | Zhengzhou Grain College, Zhengzhou 450052, China |
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| Abstract: | By means of microwave chemical vapor deposition (MWCVD) method, CH3OH/H2 gas mixtures are used as a gas source, along with a 30 nm amorphous thick silicon as a transition layer, a diamond film can successfully be grown on a stainless steel substrate, with a lowest growth temperature of 420 ℃. Tests show that the joint strength between the diamond film and the stainless steel substrate is high enough to be used as a wear-resisting layer in industry. |
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| Keywords: | 3 stainless steel diamond film MWCVD |
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