A simple calculation of the angular distribution of sputtered atoms |
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| Authors: | K Rödelsperger W Krüger A Scharmann |
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| Institution: | 1. I. Physikalisches Institut der Universit?t Gie?en, Federal Republic of Germany
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| Abstract: | Angular distributions of atoms sputtered with fast ions from smooth amorphous targets are estimated by a straightforward treatment of the collision cascade. When the geometrical situation at oblique ion impact is considered, the angle of maximum emission and the sputtering yield in dependence on the angle of ion incidence are described. |
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