X-ray scattering in multilayer structures with quantum dots

The scattering of X-rays on multilayer semiconductor structures with quantum dots was studied. Equations describing coherent and diffuse scattering in superlattices with an arbitrary number of layers in the period were obtained. Numerical simulation of coherent and diffuse scattering of X-rays from laser superlattices with different number of periods was performed to analyze the experimental data. A physical interpretation of the angular displacement of the coherent peaks from the maxima of diffuse scattering observed in the experiment is given.