Evolution of the roughness of amorphous quartz surfaces and Cr/Sc multilayer structures upon exposure to ion-beam etching |
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| Authors: | Yu. A. Vainer M. V. Zorina A. E. Pestov N. N. Salashchenko N. I. Chkhalo R. A. Khramkov |
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| Affiliation: | 1.Institute for the Physics of Microstructures,Russian Academy of Sciences,Nizhni Novgorod,Russia |
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| Abstract: | The effect of ion-beam etching on surfaces of Cr/Sc multilayer structures and amorphous quartz roughness is studied. The dependence of roughness on the depth of etching, incidence angle, and ion energy is considered. Optimal parameters of etching which provide minimal evolution of surface roughness are presented. |
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