| 脉冲准分子激光沉积Mg/Ag掺杂薄膜 |
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| 引用本文： | 胡少六,江超,王又青.脉冲准分子激光沉积Mg/Ag掺杂薄膜[J].四川激光,2004,25(2):68-69. |
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| 作者姓名： | 胡少六 江超 王又青 |
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| 作者单位： | 华中科技大学激光技术国家重点实验室,武汉,430074;华中科技大学激光技术国家重点实验室,武汉,430074;湖北师范学院物理系,黄石,435002 |
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| 摘 要： | 基于梯度掺杂功能薄膜材料在工业应用中的需要、通过金属掺杂对新材料改性研究的需要 ,用单束激光交替作用于两相异靶材 ,制备了Mg Ag组分比为 0 .9的掺杂薄膜
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| 关 键 词： | 梯度掺杂功能薄膜 掺杂改性 单束激光交替沉积 |
| 文章编号： | 0253-2743(2004)02-0068-02 |
| 修稿时间： | 2003年10月28 |
Pulsed excimer laser depositing the Mg/Ag doping thin films |
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| HU Shao-liu ,JIANG Chao ,WANG You-qing .State Key Laboratory of Laser Technology,Hua zhong University of Science and Technology,Wuhan ,China.Pulsed excimer laser depositing the Mg/Ag doping thin films[J].Laser Journal,2004,25(2):68-69. |
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| Authors: | HU Shao-liu JIANG Chao WANG You-qing State Key Laboratory of Laser Technology Hua zhong University of Science and Technology Wuhan China |
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| Institution: | HU Shao-liu 1,JIANG Chao 1,2,WANG You-qing 1 1.State Key Laboratory of Laser Technology,Hua zhong University of Science and Technology,Wuhan 430074,China) |
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| Abstract: | Based on the importance of gradient doping functional thin film to the industries,and the demand of improving the properties of kinds of new materials by doping,using one pulsed laser beam on two different targets alternately and getting the Mg/Ag doping thin film with the components proportion 0.9. |
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| Keywords: | gradient doping functional thin film improving the properties by doping single laser beam alternately deposition |
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