Investigation of yellow luminescence intensity of N-polar unintentionally doped GaN |
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Authors: | Du Da-Chao Zhang Jin-Cheng Ou Xin-Xiu Wang Hao Chen Ke Xue Jun-Shuai Xu Sheng-Rui Hao Yue |
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Affiliation: | Key Laboratory of Wide Band-Gap Semiconductors and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China |
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Abstract: | This paper reports that the yellow luminescence intensity of N-polar GaN Epi-layers is much lower than that of Ga-polar ones due to the inverse polarity, and reduces drastically in the N-polar unintentionally-doped GaN after etching in KOH solution. The ratio of yellow luminescence intensity to band-edge emission intensity decreases sharply with the etching time. The full width at half maximum of x-ray diffraction of (10-12) plane falls sharply after etching, and the surface morphology characterized by scanning electron microscope shows a rough surface that changes with the etching time. The mechanism for the generation of the yellow luminescence are explained in details. |
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Keywords: | N-polar GaN yellow luminescence KOH etching |
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