| 电子纸微杯结构金属模具的设计与制作 |
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| 引用本文： | 浦东林,胡进,朱鹏飞,魏国军,陈林森.电子纸微杯结构金属模具的设计与制作[J].液晶与显示,2011,26(2):174-177. |
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| 作者姓名： | 浦东林 胡进 朱鹏飞 魏国军 陈林森 |
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| 作者单位： | 1. 苏州大学信息光学工程研究所,江苏,苏州,215006
2. 苏州苏大维格光电科技股份有限公司,江苏,苏州,215026 |
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| 基金项目： | 国家自然科学基金资助项目(No.60777039) |
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| 摘 要： | 提出了用于电子纸的微结构金属模具的"选择生长"方法,即通过在金属基材上形成选择性的导电与不导电图形,来制作深纹的"微杯"金属模具。在金属基材上涂布负性光刻材料、用带有空间光调制器的激光直写系统曝光形成"微杯"图形,然后通过电铸工艺制作出镍金属模具。实际制作的"蜂窝"分布的微杯结构参数与设计参数基本吻合。该工艺流程适合研制更大尺寸的电子纸的微杯模具,将为"微杯"模具制作提供一种有效手段。
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| 关 键 词： | 电子纸 微杯模具 光刻电铸 |
Design and Fabrication of Metal Microcup Mould for E-Paper |
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| PU Dong-lin,HU Jin,ZHU Peng-fei,WEI Guo-jun,CHEN Lin-sen.Design and Fabrication of Metal Microcup Mould for E-Paper[J].Chinese Journal of Liquid Crystals and Displays,2011,26(2):174-177. |
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| Authors: | PU Dong-lin HU Jin ZHU Peng-fei WEI Guo-jun CHEN Lin-sen |
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| Institution: | PU Dong-lin1,HU Jin1,ZHU Peng-fei2,WEI Guo-jun1,CHEN Lin-sen1(1.Information Optical Engineering Institute of Suzhou University,Suzhou 215006,China,E-mail:pudonglin@suda.edu.cn,2.SVG Optronics,Suzhou 215026,China) |
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| Abstract: | A 'selective grow' method for fabricating E-paper metal mould was approached.The microcup pattern with insulating material was made on metal substrate and the mould was obtained with follow-up process.First,Negative photo resists was coated on the metal substrate and the microcup pattern was exposed by a SLM LDW system.Second,after developing process,the metal mould was made by electroforming.The experiment results are according to the input parameters.This method is suit for larger format process,it will b... |
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| Keywords: | E-paper microcup mould LIGA |
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