| Abstract: | The phase composition of thin rhenium films as depending on deposition conditions has been studied. In films deposited at a pressure of 10−5 torr impurity phases with simple cubic and hexagonal lattices were found. In films evaporated at a pressure of 10−8 torr only an hep phase equilibrium in bulk samples is formed. It has been concluded that in thin rhenium films no transitions to a fcc phase occurs. In the present work the dependence of thin film phase composition was investigated as a function of film thickness (∼5–500 Å), deposition rate (∼0.1–10 Å/sec) and substrate temperatur (∼ 20–450°C). The films were deposited on NaCl single crystals at a pressure of 10−5 torr (oil diffusion pump evacuation) an 10−8 torr (“Orbitron”-type pump evacuation). The measurement of film thickness was conducted by the optical interference method. |
