Der Einfluß der Rauhigkeit der Probenoberfläche auf die Ergebnisse ellipsometrischer Messungen bei GaAs

The results of ellipsometrical measurements on GaAs show some discrepancies. This fact is discussed using a simple model of the rough GaAs surface. It is demonstrated in what way a rough surface influences the ellipsometrical measurements of the film thickness and the refractive index.