The ablation of quartz wall by SF6 under radiofrequency discharge |
| |
| Authors: | G Bruno P Capezzuto F Cramarossa R d&#x;Agostino E Molinari |
| |
| Institution: | Centro di Studio per la Chimica dei Plasmi del C.N.R. Istituto di Chimica Generale ed Inorganica dell''Università Via Amendola 173, 70126-BARI ITALY;Istituto di Chimica Generale ed Inorganica Città Universitaria, 00100-ROME ITALY |
| |
| Abstract: | The behaviour of SF6 in quartz and alumina tubes of a flow reactor capacitively coupled to a 35 MHz radiofrequency generator has been investigated at pressure of 20 torr, with power levels of 3.5÷5.5 cal cm?3 sec?1 and gas flow rates ranging between 0.1 and 2 1(STP) min?1. A combination of gaschromatographic, mass spectrometric and infrared spectrophotometric techniques has shown the presence of SO2F2, SOF4, SOF2, SiF4, F2, O2 together with unreacted SF6 in the discharge products.A detailed quantitative investigation of the effluent products and of their concentration profiles versus space time and power is presented and a general mechanism for the ablation process of the quartz wall is suggested. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
