Post-CMP cleaning using acoustic streaming |
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Authors: | Ahmed A Busnaina T M Elsawy |
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Institution: | (1) Microcontamination Research Laboratory, Center for Advanced Materials Processing, Clarkson University, 13699-5725 Potsdam, NY |
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Abstract: | Noncontact surface cleaning is a desirable process in post-chemical mechanical polishing cleaning. High-frequency megasonic
cleaning utilizes acoustic streaming as the dominant particle removal mechanism. It is widely used in the semiconductor industry
for the removal of particulate contamination. This paper introduces recent results that involve the removal of silica slurry
using megasonic cleaning. A noncontact (megasonic) cleaning process for the removal of slurry residues from dipped and polished
wafers is presented. Complete particle removal (100%) was achieved using megasonics with deionized water with 1% NH4OH using wafers dipped in silica slurry. The optimum conditions for megasonic cleaning (power, temperature, and time) were
determined for the removal of the silica slurry. Up to 99% particle removal from polished wafers was accomplished using noncontact
megasonic cleaning with 1% ammonia for 15 min. |
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Keywords: | Acoustic streaming megasonic cleaning particle removal post-chemical mechanical polishing silica slurry surface cleaning |
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