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Applying reactive ionic-beam etching to correcting the shape of X-ray mirrors |
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| Authors: | A A Akhsakhalyan A D Akhsakhalyan Yu A Vainer D G Volgunov M V Zorina E B Kluenkov L A Kaskov M I Kuznetsov L M Nefedov N N Salashchenko A L Kharitonov |
| Institution: | 1. Institute for the Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia |
| Abstract: | A procedure for correcting the shape of cylindrical surfaces by means of reactive ionic-beam etching is presented. The results from an experiment on manufacturing a glass surface as an elliptical cylinder are shown. |
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