Effect of electron irradiation on fluorides of alkali-earth elements (CaF2, SrF2 and BaF2) |
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Authors: | V I Nikolaichik B P Sobolev M A Zaporozhets A S Avilov |
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Institution: | 1. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, 142432, Russia 2. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Moscow, 119333, Russia
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Abstract: | The effect of electron irradiation on fluorides of alkaline-earth elements CaF2, SrF2, and BaF2 in the column of an electron transmission microscope is studied by means of elemental and diffraction analysis. It is established that when the current density of the electron beam exceeds the threshold value, we observe the desorption of fluorine and the binding of liberated metal ions by the oxygen of the residual vacuum to form oxide phase MeO (Me = Ca, Sr, and Ba) with the structure of rock salt NaCl. |
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