Self-consistent modelling of argon microwave discharge sustained by electromagnetic wave in dipole mode

Microwave discharges produced by travelling/standing electromagnetic waves have drawn considerable attention in recent years due to their wide application in microelectronic industry. Here are presented the axial distributions of the electrons and ions as well as those of excited atoms in an argon microwave discharge at a low gas pressure (400 mTorr) sustained by a 2.45 GHz travelling dipolar electromagnetic wave. The numerical calculations are based on a self-consistent kinetic-electrodynamic model and the results obtained are in a good agreement with the experimental data. The model yields also the magnitude of the wave power sustaining the discharge and the axial profiles of all electromagnetic-wave characteristics and the axial distribution of the neutral gas temperature.