| Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates |
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| 作者姓名： | 李代林 王向朝 刘英明 |
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| 作者单位： | Shanghai Institute of Optics and Fine Mechanics，Chinese Academy of Sciences，Shanghai 201800，Shanghai Institute of Optics and Fine Mechanics，Chinese Academy of Sciences，Shanghai 201800，Shanghai Institute of Optics and Fine Mechanics，Chinese Academy of Sciences，Shanghai 201800 |
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| 基金项目： | This work was supported by the National High Technology Development 863 Program of China (No. 2002AA404050)，the Foundation for Development of Science of Shanghai (No. 0214nm091). |
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| 摘 要： | A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from Sight intensity fluctuations caused by the modulation current can be decreased greatly. The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.
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