| 微模塑法制备PMMA球面微透镜阵列 |
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| 引用本文： | 朱建华,石锦霞,汪元,何平笙.微模塑法制备PMMA球面微透镜阵列[J].化学物理学报,2006,19(5):443-446. |
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| 作者姓名： | 朱建华 石锦霞 汪元 何平笙 |
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| 作者单位： | 中国科学技术大学高分子科学与工程系，中国科学技术大学高分子科学与工程系，中国科学技术大学高分子科学与工程系，中国科学技术大学高分子科学与工程系 合肥 230026，合肥 230026，合肥 230026，合肥 230026 |
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| 摘 要： | 借助微透镜及其阵列的光学器件,采用软刻蚀技术中的微模型方法成功制备了聚甲基丙烯酸甲酯(PMMA)的柱体及球面微透镜阵列,并对该微透镜阵列进行了光学显微和SEM分析．通过考察制备过程中的影响因素,探讨了减少阵列缺陷和提高光学性能的适宜参数．并对该透镜阵列的光学成像性能进行了初步研究．
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| 关 键 词： | 热模塑 聚甲基丙烯酸甲酯 微透镜阵列 |
| 收稿时间： | 8/1/2005 12:00:00 AM |
Spherical Micro-lens Array of PMMA Produced by Micro-molding |
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| Jian-hua Zhu,Jin-xia Shi,Yuan Wang and Ping-sheng He.Spherical Micro-lens Array of PMMA Produced by Micro-molding[J].Chinese Journal of Chemical Physics,2006,19(5):443-446. |
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| Authors: | Jian-hua Zhu Jin-xia Shi Yuan Wang and Ping-sheng He |
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| Institution: | Department of Polymer Science and Engineering, University of Science and Technology of China, Hefei 230025, China |
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| Abstract: | Micro-lens (ML) and Micro-lens array (MLA) are important optical components widely used in many fields; Soft-lithography, a vital little process technology, has its unique performance to produce ML and MLA; The cylinder and spherical MLA of polymethyl methacrylate (PMMA) were successfully obtained by micro-molding inSoft-lithography. Some suitable experimental parameters in the process were discussed, and the imaging property of the MLA was also studied simply. |
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| Keywords: | Micro-molding Polymethyl methacrylate (PMMA) Micro-lens array |
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