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新型微流通池pH-ISFET集成传感器
引用本文:丁辛芳.新型微流通池pH-ISFET集成传感器[J].电子器件,1996(3).
作者姓名:丁辛芳
作者单位:东南大学微电子中心
摘    要:设计与制备了带Ti/Au膜参考电极的长臂式pH-ISFET集成传感器与微流通池。在静态和流动分析系统测量中表明:由蠕动泵驱动的待测液流动极畅,且试样量极少,响应速度快。

关 键 词:pH-ISFET集成传感器  微流通池  FIA系统

A Novel Micro Flow-Through Cell pH-ISFET Integrated Sensor
Microelectronic Center,Southeast University.A Novel Micro Flow-Through Cell pH-ISFET Integrated Sensor[J].Journal of Electron Devices,1996(3).
Authors:Microelectronic Center  Southeast University
Abstract:The long-armed pH-ISFET integrated sensor with Ti/Au film reference electrode and the micro flowthrough cell are designed and developed. The initial results of the static and flow injection analysis measurements indicate that the liquid to be measured driven by peristaltic pump flows with great fluency, the amount of the test sample needed and the ion sensitive-sensor can make a quick reponse.
Keywords:pH-ISFET integreted sensor  micro fiow-through cell  flow injectionn analysis (FIA) system
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