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A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon |
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| Authors: | J. F. Behnke E. Passoth C. Csambal M. Tichý P. Kudrna D. Trunec A. Brablec |
| Affiliation: | (1) Institute of Physics, Faculty of Mathematics and Natural Sciences, Ernst-Moritz-Arndt University, Domstrasse 10a, 17 487 Greifswald, Germany;(2) Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, 180 00 Praha 8, Czech Republic;(3) Department of Physical Electronics, Faculty of Natural Sciences, Masaryk University, Kotlářská 2, 611 37 Brno, Czech Republic |
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