|
|||||
|
|
A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon |
|
| Authors: | J F Behnke E Passoth C Csambal M Tichý P Kudrna D Trunec A Brablec |
| Institution: | (1) Institute of Physics, Faculty of Mathematics and Natural Sciences, Ernst-Moritz-Arndt University, Domstrasse 10a, 17 487 Greifswald, Germany;(2) Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, 180 00 Praha 8, Czech Republic;(3) Department of Physical Electronics, Faculty of Natural Sciences, Masaryk University, Kotlářská 2, 611 37 Brno, Czech Republic |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |