Effects of excimer laser illumination on microdrilling into an oblique polymer surface |
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Authors: | Chih-Yang Wu Chun-Wei Shu Zhi-Chang Yeh |
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Affiliation: | Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan, ROC |
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Abstract: | In this work, we present the experimental results of micromachining into polymethy-methacrylate exposed to oblique KrF excimer laser beams. The results of low-aspect-ratio ablations show that the ablation rate decreases monotonously with the increase of incident angle for various fluences. The ablation rate of high-aspect-ratio drilling with opening center on the focal plane is almost independent of incident angles and is less than that of low-aspect-ratio ablation. The results of high-aspect-ratio ablations show that the openings of the holes at a distance from the focal plane are enlarged and their edges are blurred. Besides, the depth of a hole in the samples oblique to the laser beam at a distance from the focal plane decreases with the increase of the distance from the focal plane. The number of deep holes generated by oblique laser beams through a matrix of apertures decreases with the increase of incident angle. Those phenomena reveal the influence of the local light intensity on microdrilling into an oblique surface. |
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Keywords: | Excimer laser micromachining Ablation Oblique incidence Local light distribution |
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