Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components |
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| Authors: | R.R.A. Syms A.S. Holmes W. Huang V.M. Schneider M. Green |
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| Affiliation: | (1) Optical and Semiconductor Devices Section, Dept. of Electrical and Electronic Engineering, Imperial College, Exhibition Road, London, SW7 2BT, UK |
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| Abstract: | The SC-RTA process for fabricating silica-on-silicon PLCs from sol-gel glass is described. A wide range of glasses has been deposited, process temperatures have been reduced, and components fabricated by reactive ion etching, reflow and burial of channel guides have shown steadily decreasing loss. Propagation losses are  0.2 dB/cm at  = 1.523  m in a high  n system. Passive components demonstrated include tree-structured power splitters and thermo-optic switches. |
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| Keywords: | sol-gel glass silica-on-silicon integrated optics planar lightwave circuit |
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