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PECVD SiC optical waveguide loss and mode characteristics |
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| Authors: | G Pandraud HTM Pham PJ French PM Sarro |
| Institution: | aFaculty of Electrical Engineering, Electronic Instrumentation Laboratory, Mathematics and Computer Science, Department of Microelectronics, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands;bDIMES-ECTM, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands |
| Abstract: | We report the fabrication of single mode SiC (silicon carbide) waveguides and the measurement of their propagation loss. By studying the effect of sidewalls scattering loss due to surface roughness and by reducing it, minimal propagation loss of 2.3 dB/cm for the TM polarization is measured in the visible at 0.633 μm. This loss can be used as a benchmark for further development of SiC microphotonic components and circuit for sensor systems in harsh environment. |
| Keywords: | PECVD SiC Optical planar waveguide loss |
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