Quantification in grazing-emission X-ray fluorescence spectrometry

In grazing-emission X-ray fluorescence (GEXRF) spectrometry wavelength-dispersive detection can be applied. Much softer radiation and hence lighter elements than in total-reflection X-ray (TXRF) spectrometry can thus be detected. We used simulations to investigate methods of quantification of GEXRF results involving soft characteristic radiation. From these studies, it is concluded that for ultra-thin layers, e.g. the sub-monolayer amounts encountered in semiconductor contamination analysis, calibration plots are linear. For thicker layers, quantification should be performed very carefully because of deviations from linearity due to absorption of radiation and to oscillations in the calibration curve. These oscillations are caused by interference of fluorescence radiation emitted directly towards the detector and radiation reflected at the sample–substrate interface. Suggestions for a judicious choice of measurement conditions are made and the benefits of internal standardisation are discussed.