一种基于脉冲红外光源和折叠光路的微小型红外光谱仪

设计了一种不同于传统光栅扫描型光谱仪的新型微小型红外光谱仪。该光谱仪采用灵敏度高且体积小巧的非致冷红外探测器LiTaO₃,在光路上直接采用MEMS脉冲红外光源，从而去掉了传统机械斩波器，并通过折叠光路进一步减小光谱仪体积。初步结果显示，所设计的微小型红外光谱仪的方法是可行的，工作波段2 000～5 000 nm, 光谱带宽45 nm，可用来分析塑料薄膜、生物液体以及环境大气在内的样品。

Development of a Micro-Infrared Spectrometer Based on Pulse Infrared Light Source and Two-Double Light Route

A novel micro infrared spectrometer was designed which is different from traditional grating scanning one. This micro spectrometer introduced an uncooled infrared detector LiTaO3 with high sensitivity and small volume, and a MEMS pulsed infrared light source was adopted as emitter and chopper, which threw off traditional mechanical chopper. Combined with the design of a two-double light route, the volume of micro spectrometer was made even smaller. Primary results show that the design method of micro-infrared spectrometer is feasible, the wavelength range of instrument is wide, from 2 000 to 5 000 nm, and spectrum bandwidth is about 45 nm, which can be used for the sample analysis, such as plastic films, biologic liquid, environmental gas and so on.