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单发实验测量软X射线多层膜反射镜反射特性
引用本文:王伟,倪元龙,万炳根,孙今人,吴江,王琛,孙玉琴,周关林,顾援,王世绩. 单发实验测量软X射线多层膜反射镜反射特性[J]. 强激光与粒子束, 2001, 13(5): 525-528
作者姓名:王伟  倪元龙  万炳根  孙今人  吴江  王琛  孙玉琴  周关林  顾援  王世绩
作者单位:高功率激光物理国家实验室,上海激光等离子体研究所,上海800-229信箱,201800
基金项目:国家 8 63激光技术领域资助课题 (863 -4 10 -3 .3
摘    要: 提出了一种单发实验测量软X射线波段多层膜反射镜反射特性的简易方法。实验采用激光等离子体软X射线源作为光源,用平焦场光栅谱仪分光,在光路中引入掠入射镜以消除高级次谱的影响,用软X光CCD记录,在一发激光打靶实验中,测量了设计中心波长为13.9 nm的Mo/Si多层膜反射镜的反射特性。

关 键 词:Mo/Si多层膜反射镜  反射率  软X射线  激光等离子体
文章编号:1001-4322(2001)05-0525-04
收稿时间:2001-03-27
修稿时间:2001-03-27

Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance
WANG Wei,NI Yuan long,WAN Bing gen,SUN Jin ren,WU Jiang,WANG Chen,SUN Yu qin,ZHOU Guan lin,GU Yuan,WANG Shi ji. Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance[J]. High Power Laser and Particle Beams, 2001, 13(5): 525-528
Authors:WANG Wei  NI Yuan long  WAN Bing gen  SUN Jin ren  WU Jiang  WANG Chen  SUN Yu qin  ZHOU Guan lin  GU Yuan  WANG Shi ji
Affiliation:National Laboratory on High Power Laser and Physics, Shanghai Institute of Laser Plasma, P.O.Box 800-229, Shanghai 201800, China
Abstract:A new method of single shot measurement of normal incidence soft X ray Mo/Si multilayer mirror's reflectance was proposed. Experiment were performed using laser produced plasma X ray source, flat field grating spectrometer and soft X ray CCD. Grazing incident mirror was employed to eliminate high order contribution. Wavelength was accurately determined by the 17.04nm L edge of Al filter. Measurements of Mo/Si multilayer mirror showed a peak reflectance of 35% at 14nm with a 0.5nm bandwidth.
Keywords:Mo/Si multi layer mirror  reflectance  soft X ray  laser produced plasma
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