Features in atomic force microscopy studies of dielectric surfaces

To improve the accuracy of AFM measurements in air and the reproducibility of results, a clean room-based metrological facility has been designed and built. The main function of the facility is to control temperature and humidity in an operation zone in various combinations and to maintain them with high accuracy. Measurements under controlled conditions are particularly important for dielectric materials. It has been shown that special procedures allow one to avoid disturbances caused by static charges on the surface under study, i.e., to remove the already accumulated charge and prevent its appearance during experiments. The use of the proposed procedures makes it possible to adequately study the features of the dielectric surface relief at micro-and nanoscale levels.