由组分可控的LB膜前驱物法制备Y2O3稳定立方相ZrO2的超薄陶瓷膜

由有机LB膜技术发展了一种制备组分、厚度可控的无机超薄陶瓷膜的方法.以Zr、 Y的β-二酮络合物的作为"表面离子"代替传统的亚相离子,沉积它们与花生酸的混合LB膜.并将它作为前驱物,经臭氧处理和热处理,成功制得了Y2O3稳定的立方相ZrO2超薄膜(YSZ).用X射线衍射(XRD)、 X射线光电子能谱(XPS)等手段研究了YSZ薄膜的相结构和其组成.结果表明,超薄陶瓷膜中Zr与Y的含量比率控制得很好,且形成Y2O3稳定的立方相ZrO2.说明这种方法可以成功地用来制备组分和膜厚均可控的纳米陶瓷膜.

Fabrication of Y2O3-stablized ZrO2 Ultrathin Film by Newly Developed Component-Controllable Langmuir-Blodgett Method

A fabrication technique of component-controllable multi-component ultra thin ceramic films has been developed by a promising LB method. The precursorofY2O3-stablized ZrO2(YSZ) ultra thin film was prepared with ZirconiumIV2, 2,6,6-tetramethylheptanedionate (Zr(tmhd)4) and yttrium 2,2,6,6-tetramethylheptanedionate (Y(tmhd)3) as surface ions on the subphase surface instead of traditional subphase ions. Zr(tmhd)4) and Y(tmhd)3can combine arachidic acid (AA) to forma uniformmixed monolayeron pure water subphase. The π~Aisotherms indicate that the mixed monolayer with a mixed ratio of Zr(tmhd)4∶Y(tmhd)3∶AA=4.5∶1∶11 on pure water is very stable and can be successfully transferred onto the silica substrate by LB technique. Y-type LB films were fabricated. The YSZ films were obtained through a combination of room temperature Ultra-Violet/ozone (UVO) decomposition and annealing treatments at a high temperature. The X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) measurements demonstrate that the fina films are single YSZ phase with a fluorite cubic structure and the components of the films can be accurately controlled through the whole process.