Affiliation: | Faculty of Education, Fukui University, Fukui 910, Japan Faculty of Science and Engineering Kinki University, Osaka 577, Japan Department of Mechatrosystems, Shibuya Kogyo Co., Kanazawa 920, Japan |
Abstract: | The nature of CO2 laser marking was studied with a view to putting these lasers to practical use in the semiconductor industry. The marking is found to be due to surface spattering rather than burning, which is the main factor in YAG laser marking. The visibility greatly increases by the application of a surface treatment such as marker ink, varnish or poster color. The CO2 laser may therefore be used in place of the YAG laser, now widely used for marking, with some merits: CO2 laser marking is cheaper and faster, and in addition there is no danger of injury from irradiating laser light. |