| 非晶硅薄膜晶化过程中微结构的分析 |
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| 引用本文： | 何宇亮,周衡南,刘湘娜,程光煦,余是东.非晶硅薄膜晶化过程中微结构的分析[J].物理学报,1990,39(11):1796-1802. |
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| 作者姓名： | 何宇亮 周衡南 刘湘娜 程光煦 余是东 |
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| 作者单位： | (1)南京大学固体微结构物理实验室,南京,210008; (2)南京大学物理系,南京,210008 |
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| 基金项目： | 国家自然科学基金资助的课题 |
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| 摘 要： | 使用X射线衍射技术和高分辨率电子显微镜(HREM),分析研究了在非晶硅薄膜由非晶相向微晶相转化过程中其网络结构的变化特征,由此,给人们一个直观的信息,并加深对非晶硅薄膜微结构的认识。
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| 关 键 词： | 非晶 硅 薄膜 晶化 微结构 |
| 收稿时间： | 1989-11-29 |
STUDIES AND ANALYSIS FOR MICROSTRUCTURES OF MICRO-CRYSTALLIZATION PROCESS OF AMORPHOUS SILICON FILMS |
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| HE YU-LIANG,ZHOU HENG-NAN,LIU XIANG-NA,CHENG GUANG-XU and YU SHI-DONG.STUDIES AND ANALYSIS FOR MICROSTRUCTURES OF MICRO-CRYSTALLIZATION PROCESS OF AMORPHOUS SILICON FILMS[J].Acta Physica Sinica,1990,39(11):1796-1802. |
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| Authors: | HE YU-LIANG ZHOU HENG-NAN LIU XIANG-NA CHENG GUANG-XU and YU SHI-DONG |
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| Abstract: | We have studied the fine procedure and characters of the microstructures for the a-Si:H and a-Si films, which have been changed from amorphous phase to microcrystalline phase, by means of Rigaku 3015 type X-ray diffraction spectroscope and high resolution electronic microscopy (HREM). This research provides some intuitive information for the transformation process, in which amorphous silicon filims change over from amorphous phase to micro-crystalline phase, and further deepens the understanding for the microstructures of amorphous silicon films. |
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