Study on the RF Power Necessary to Ignite Plasma for the ICP Test Facility at HUST |
| |
| Authors: | Haikun Yue Dong Li Chenre Wang Xiaofei Li Dezhi Chen Kaifeng Liu Chi Zhou Ruimin Pan |
| |
| Institution: | 1. School of Electronic Information and Communications, Huazhong University of Science and Technology, Wuhan 430074, China;2. State Key Laboratory of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology, Wuhan 430074, China |
| |
| Abstract: | An Radio‐Frequency (RF) Inductively Coupled Plasma (ICP) ion source test facility has been successfully developed at Huazhong University of Science and Technology (HUST). As part of a study on hydrogen plasma, the influence of three main operation parameters on the RF power necessary to ignite plasma was investigated. At 6 Pa, the RF power necessary to ignite plasma influenced little by the filament heating current from 5 A to 9 A. The RF power necessary to ignite plasma increased rapidly with the operation pressure decreasing from 8 Pa to 4 Pa. The RF power necessary to ignite plasma decreased with the number of coil turns from 6 to 10. During the experiments, plasma was produced with the electron density of the order of 1016m–3 and the electron temperature of around 4 eV. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
| |
| Keywords: | ICP RF power Plasma ignition |
|
|
