离轴非球面在细磨与粗抛阶段的波面再现技术

基于付科法的离轴非球面波面再现检测技术,通过对付科检测过程的数学分析,建立了离轴非球面波面再现的数学模型,提出了波面整合算法,通过对两幅阴影图灰度值积分、去倾斜及波面整合等数据处理再现出被检离轴非球面的波面误差.在被检离轴非球面两个方向的弥散斑分别为0.152mm和0.284mm时,干涉检测得到其面形误差峰谷值为1.110μm、均方根值为0.194μm,且两种检测方法的波面轮廓相一致.实验结果验证了基于付科法的离轴非球面再现技术的正确性,可以应用于指导离轴非球面在细磨粗抛阶段的加工并且实现与精抛光阶段干涉检测的有效衔接.

Technology of Wavefront Retrieval for Off-axis Aspheric Surface in the Stage of Fine-grinding and Rough-polishing

According to the disadvantages of traditional Foucault test,the wavefront retrieval technology of off-axis aspheric surfaces is proposed.According to the mathematical analysis of Foucault test,a mathematical model is established and the wavefront integrating algorithm is proposed to reconstruct wavefront of the off-axis aspherical surface through integrating gray values of two Foucault pattern,removing tilt of wavefront map,and wavefront integration etc.When the circles of confusion in two directions reach to 0.152 mm and 0.284 mm,the surface error tested by interferometer is that PV value is 1.110 μm and RMS value is 0.194 μm,and the wavefront patterns are consistent.Experiment proves that the technology of wavefront retrieval is correct and can be used to guide the manufacture of off-axis aspherical surface until to be coherent with interferometer test of the fine grinding stage.