| Optimization of large-area YBa2Cu3O7-δ thin films by pulsed laser deposition for planar microwave devices |
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| 引用本文： | 熊沛雨,陈赋聪,冯中沛,杨景婷,夏钰东,袁跃峰,王旭,袁洁,吴云,石兢,金魁.Optimization of large-area YBa2Cu3O7-δ thin films by pulsed laser deposition for planar microwave devices[J].中国物理 B,2023(7):221-225. |
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| 作者姓名： | 熊沛雨 陈赋聪 冯中沛 杨景婷 夏钰东 袁跃峰 王旭 袁洁 吴云 石兢 金魁 |
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| 作者单位： | 1. School of Physical Science and Technology, Wuhan University;2. Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences;3. Songshan Lake Materials Laboratory;4. School of Physical Science and Technology, Southwest Jiaotong University |
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| 基金项目： | Project supported by the National Key Basic Research Program of China (Grant Nos. 2022YFA1603903 and 2021YFA0718700)；;the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0101340002)；;the National Natural Science Foundation of China (Grant Nos. 61971415, 51972012, 11927808, 119611410, 11961141008, and 12274439)；;the Strategic Priority Research Program (B) of Chinese Academy of Sciences (Grant No. XDB25000000)；;Beijing Natural Science Foundation (Grant No. Z190008)； |
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| 摘 要： | This paper presents high quality YBa2Cu3O7-δ(YBCO) thin films on LaAlO3 substrate for microwave devices prepared by pulsed laser deposition(PLD). The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications, such as surface morphology and surface resistance(Rs).This was achieved by improving the target quality and increasing the oxygen pressure during deposition, respectively. To ev...
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