Analyzing sub-100-μm samples with transmission terahertz time domain spectroscopy

The authors propose a method for the extraction of material parameter and thickness information from sub-100-μm thin samples using non-differential transmission terahertz time domain spectroscopy. The approach relies on an additional Fourier transform of the frequency dependent material parameters to a quasi space regime. In this quasi space, periodic Fabry-Perot oscillations from the frequency domain, which originate from multiple reflections inside the sample, correspond to discrete peaks. By iterative minimization of these peaks, the highly precise thickness information along with the refractive index and absorption coefficient of the sample can be determined. Experimental verification of the approach is also provided.