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Dual-frequency paired polarization phase shifting ellipsometer |
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| Authors: | Chih-Jen Yu Hui-Kang Teng Chien Chou |
| Affiliation: | a Department of Optics and Photonics, National Central University, Jhongli 320, Taiwan b Graduate Institute of Electrical Engineering, Nan-Kai Institute of Technology, NanTou 542, Taiwan c Graduate Institute of Photonics and Optoelectronics, Department of Electrical Engineering, National Taiwan University, Taipei 106, Taiwan d Department of Biomedical Imaging and Radiological Science, Institute of Biophotonics, National Yang-Ming University, 155 Li-Nong St. Sec. 2, Pei-Tou, Taipei 112, Taiwan e Graduate Institute of Electro-Optical Engineering, Chang Gung University, Taoyuan 333, Taiwan |
| Abstract: | A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis. |
| Keywords: | Optical heterodyne interferometer Ellipsometry Dual-frequency laser Phase shifting technique |
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