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Morphological and elemental characterisation with the high-energy ion-nanoprobe LIPSION
Authors:T. Butz  Ch. Meinecke  M. Morawski  T. Reinert  M. Schwertner  D. Spemann  J. Vogt
Affiliation:Nukleare Festkörperphysik, Fakultät für Physik und Geowissenschaften, Universität Leipzig, Linnéstr.5, 04103 Leipzig, Germany
Abstract:This contribution deals with the morphological and elemental characterisation with high-energy (MeV) focused ion beams (in particular protons) with special emphasis on high spatial resolution in the sub-micrometer regime and very low minimum detection limits (sub-ppm) in trace element analysis. The most important methods like particle induced X-ray emission (PIXE), Rutherford backscattering spectrometry (RBS), as well as scanning transmission ion microscopy (STIM) and STIM-tomography will be illustrated by examples from material and life sciences.
Keywords:07.81.+a   78.70.En   82.80.Yc   68.55.&minus  a
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