Preparation and characterization of carbonate terminated polycrystalline Al2O3/Al films |
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| Authors: | C Tornow P-LM Noeske R Wilken K Gärtner |
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| Institution: | a Fraunhofer-Institute for Manufacturing Technology and Applied Materials Research (IFAM), Adhesive Bonding Technology and Surfaces, Wiener Str. 12, D-28359 Bremen, Germany
b Fachhochschule Oldenburg/Ostfriesland/Wilhelmshaven, University of Applied Sciences, Faculty of Technology, Department of Applied Natural Sciences, Engineering Physics, Constantiaplatz 4, D-26723 Emden, Germany |
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| Abstract: | X-ray photoelectron spectroscopy (XPS) was applied to investigate the surface reactivity of polycrystalline Al films in contact with a gas mixture of carbon dioxide and oxygen at room temperature. Based on the characterization of interactions between these substrates and the individual gases at selected exposures, various surface functionalities were identified. Simultaneously dosing both carbon dioxide and oxygen is shown to create surface-terminating carbonate species, which contribute to inhibiting the formation of an Al2O3 layer. Finally, a reaction scheme is suggested to account for the observed dependence of surface group formation on the dosing conditions. |
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| Keywords: | 79 60 &minus i 81 65 Mq 82 65 My |
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