Spray pyrolysis deposition of YSZ and YSZ-Pt composite films |
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Authors: | R Todorovska D Todorovsky |
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Institution: | a Faculty of Chemistry, University of Sofia, 1, J. Bourchier Blvd., Sofia 1164, Bulgaria b Institute of Electronics, Bulgarian Academy of Sciences, 72, Tsarigradsko Shousse Blvd., Sofia 1784, Bulgaria |
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Abstract: | In the present paper procedures are described for spray pyrolysis deposition of YSZ films (0.1-30 μm in thickness) with 8 or 15 mole % of YO1.5 on different substrates. Aqueous or ethylene glycol solutions of Y-Zr-citrates were used as starting material and O2 as carrier gas. The crystal structure and the morphology of the films were studied.The optimal deposition and post-deposition annealing conditions were defined, taking into account the desired film thickness and characteristics. Substrate temperatures of 250 °C during the deposition followed by heating for 10 min to 400 °C after every spraying and to 590 °C after every three sprayings with final annealing at 590 °C for 2 h in static air atmosphere were found to be suitable for the production of dense, uniform and cracks-free films. |
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Keywords: | 81 15 -z 81 15 Rs 68 55 -a 81 20 Fw |
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