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Summary of ISO/TC 201 standard: XXII. ISO 22048:2004—Surface chemical analysis—Information format for static secondary ion mass spectrometry |
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| Abstract: | This International Standard provides a digital format to store and transfer between computers, in a compact way, important calibration and instrumental parameter data necessary to make effective use of spectral data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976. Copyright © 2004 John Wiley & Sons, Ltd. |
| Keywords: | SIMS secondary ion mass spectrometry secondary ion data transfer format time of flight ToF mass scale |