| Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method |
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| 引用本文： | 张谷令,王久丽,刘元富,刘赤子,杨思泽. Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method[J]. 中国物理, 2004, 13(8): 1309-1314 |
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| 作者姓名： | 张谷令 王久丽 刘元富 刘赤子 杨思泽 |
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| 作者单位： | Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China |
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| 基金项目： | Project supported by the National High Technology Development Programme of China (Grant No 2002A331020), the National Natural Science Foundation of China (Grant No 50071068 and 10275088), the Science and Technology Program of Beijing Municipal Science and Technology Commission (Grant No H020420160130), and the ARO-FE (Grant No N62649-02-1-0010). |
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| 摘 要： | Using a new inner surface modification method named GEPSII (grid-enhanced plasma source ion implantation), which is designed for inner surface modification of tubular work pieces, we successfully produced polycrystalline TiN coating on 0.45% C steel (45^# steel) samples. Compared with the uncoated 45^# steel sample, the electrochemical corrosion test on the coated 45^# steel samples presents evident improvement in their corrosion resistance. Two implanted voltages, direct current (－2kV) and pulsed negative voltage (－10kV), are applied on the substrates. It is shown that the direct current implantation is more effective than the pulsed implantation in the surface corrosion resistance. AES depth profile shows that coating thickness is about tens of nanometres. The preferred orientations expressed by peaks at (111) and (200) can be seen clearly in XRD patterns.
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| 关 键 词： | 等离子体源离子注入 多晶氮化钛 电化学腐蚀 内表面 脉冲负电压 |
| 收稿时间： | 2003-12-09 |
| 修稿时间： | 2004-04-08 |
Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method |
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| Zhang Gu-Ling,Wang Jiu-Li,Liu Yuan-Fu,Liu Chi-Zi and Yang Si-Ze. Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method[J]. Chinese Physics, 2004, 13(8): 1309-1314 |
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| Authors: | Zhang Gu-Ling Wang Jiu-Li Liu Yuan-Fu Liu Chi-Zi Yang Si-Ze |
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| Affiliation: | Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | Using a new inner surface modification method named GEPSII (grid-enhanced plasma source ion implantation), which is designed for inner surface modification of tubular work pieces, we successfully produced polycrystalline TiN coating on 0.45% C steel (45^# steel) samples. Compared with the uncoated 45^# steel sample, the electrochemical corrosion test on the coated 45^# steel samples presents evident improvement in their corrosion resistance. Two implanted voltages, direct current (－2kV) and pulsed negative voltage (－10kV), are applied on the substrates. It is shown that the direct current implantation is more effective than the pulsed implantation in the surface corrosion resistance. AES depth profile shows that coating thickness is about tens of nanometres. The preferred orientations expressed by peaks at (111) and (200) can be seen clearly in XRD patterns. |
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| Keywords: | PSII inner surface TiN corrosion resistance |
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