| Affiliation: | 1. Materials Science and Engineering Program, University of California, San Diego, La Jolla, CA 92093, USA;2. Department of Chemistry and Biochemistry, University of California, San Diego, La Jolla, CA 92093, USA;3. TD Research, GLOBALFOUNDRIES USA Inc., 257 Fuller Road, Albany, NY 12203, USA;1. Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;2. University of Chinese Academy of Sciences, Beijing 100049, China;3. Microelectronics Department, North China University of Technology, Beijing 100041, China |
