Nanometer-scale ablation with a table-top soft x-ray laser |
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| Authors: | Vaschenko G Etxarri A Garcia Menoni C S Rocca J J Hemberg O Bloom S Chao W Anderson E H Attwood D T Lu Y Parkinson B |
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| Affiliation: | NSF ERC for Extreme Ultraviolet Science and Technology and Department of Electrical and Computeer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA. |
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| Abstract: | Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes. |
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