| 氧化锌铝薄膜的光电特性、制备技术及应用 |
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| 引用本文： | 王华.氧化锌铝薄膜的光电特性、制备技术及应用[J].电子元件与材料,2005,24(5):59-62. |
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| 作者姓名： | 王华 |
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| 作者单位： | 桂林电子工业学院信息材料科学与工程系,广西,桂林,541004 |
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| 摘 要： | ZAO薄膜具有低电导率、高可见光透射率、高红外光反射率及其它半导体特性,应用于平板显示器件、太阳能电池、反射热镜、气体敏感器件、特殊功能窗口涂层等领域。ZAO薄膜原料易得,制造成本低廉,无毒,易于实现掺杂,且在等离子体中稳定性好,易刻蚀,因而有可能成为ITO的替代产品,尤其是在太阳能电池透明电极领域。
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| 关 键 词： | 电子技术 ZAO薄膜 综述 光电特性 制备方法 应用前景 |
| 文章编号： | 1001-2028(2005)05-0059-04 |
Optical and Electrical Characteristics, Preparation and Application of Al Doped Zinc Oxide Thin Films |
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| WANG Hua.Optical and Electrical Characteristics, Preparation and Application of Al Doped Zinc Oxide Thin Films[J].Electronic Components & Materials,2005,24(5):59-62. |
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| Authors: | WANG Hua |
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| Abstract: | ZAO can be used commonly in many fields, such as flat-panel displays, solar cells, sensor of gas, special functional coat due to its high conductance, high transmittance of visible light, high reflectivity of infrared light and other characteristics of semiconductor. The abundant reserves of raw material, low cost, no poison, easy to dope, good stability in plasm and easy to etch make ZAO films a substitute of ITO, specially in solar cells field. |
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| Keywords: | electronic technology ZAO thin film review optical and electrical characteristics fabrication methods application prospect |
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