Acquisition and quantification of ion images with a camera-based detection system and classical quantification algorithms |
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Authors: | F. Michiels W. Vanhoolst P. Van Espen F. Adams |
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Affiliation: | 1. Department of Chemistry, University of Antwerp (U.I.A.), Universiteitsplein 1, B-2610, Wihijk, Belgium
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Abstract: | The quantitative analytical characteristics of a camera-based detection system for secondary ion microscopy are studied in detail. Through multiple exposures, ion images with large dynamic ranges are obtained. The quantification of these images by the sensitivity factor method and the matrix ion species ratio method is described and evaluated by the analysis of steel and aluminum standard reference materials. |
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